100,000 SF Class 100 cleanroom to support the fabrication of 0.25-micron DRAM. 500,000 SF support space. Scope includes process tools, HPM rooms, installation of bulk gas, chemical mechanical polishing, UPW/IWT plant, exhaust, make-up air, filter fan units, SCADA systems, and new Central Energy Plant with 7,500-ton chiller capacity. 750,000 SF project was completed in 55 weeks.